• Ebpay

    Wafer Cassette Load Port Station(LPS)
    The Load Port Station collaborates with OHT to load and unload FOUP via E84 communication, enabling seamless communication with the upper-level MCS/EAP system.

    Optional configuration: Single port and double ports; Clamp
    Feature Highlights:

    User-friendly man-machine interface

    Stable system integration

    Load/Unload autonomous switching

    SEMI S2 certified

    Compatibility with multiple EAP communications

    Available Clamp option

    Software Description
    LPS Software
    LPS Software
    The LPS Software provides a real-time display of the operational status of each platform (Port), encompassing operation mode, service status, sensor status, external IO output status, and Foup-related information.

    Feature Highlights:
    ▪ Single client architecture, minimizing hardware requirements, easy to deploy and maintain, supporting a variety of databases.
    ▪ Accurate identification of product information, collaborating with the AMHS system to expedite product delivery and achieve optimal on-site product process operations.
    ▪ Reducing the risk of human transportation, cutting operating costs, and ensuring the best product quality.
    Important Parameters
    Technical IndicatorsParameters
    Dimensions (L*W*H)

    272(mm)*523(mm)*1720(mm)

    Weight

    150kg

    Load (number of positions)

    30kg

    Vibration

    		<0.5G

    Noise

    ≤70Db


    BACK