Ebpay

    OHB Purge(OHBP)
    With the OHT track system, it provides air bulk storage space for photomask pods, enhancing the space utilization rate in the wafer fab and maximizing the transport efficiency of wafer carriers between processes. The purge unit is installed through the purge pipeline layout, filling pure gas to ensure the micro-environment within the photomask pod and improving yield.

    Optional configuration: Storage position: 1 cell, 2 cells, 3 cells, 4 cells
    Feature Highlights:

    Combined type with row frame

    Integrated control of the entire Bay

    Independently control of specific Shelf

    Power-off sustainable Purge

    Purging only when materials are present

    Idle Purge

    Software Description
    OHBP Software
    OHBP Software
    The OHBP control system cleans and purges the ports of the entire bay, offering two modes: continuous purge and inductive purge. It can be equipped with RFID sensors and temperature/humidity sensors, recording the number of Foup placements and tracking temperature/humidity changes throughout the purge process. In case of abnormal RFID readings or substandard temperature/humidity, it provides real-time alarm functionality;

    The Web UI interface allows for manual adjustment of the proportional valve, real-time control of airflow, adjustment of temperature, humidity, flow, and pressure monitoring ranges, and manual control of the solenoid valve's switch.

    Feature Highlights:
    ▪ Multi-disk real-time monitoring, ensuring stability and reliability.
    ▪ With the MF FabScope system, it can quickly pinpoint the of any abnormal disk status.
    ▪ Recipe management is supported.
    Important Parameters


    Technical IndicatorsParameters
    Flow Spec0~50L/Min
    Humidity RH < 10% Purge duration depending on flow

    Inlet Pressure

    Accuracy ±1.5%, Range 60SLM

    Outlet Pressure

    Accuracy ± 0.5%

    Filtration Precision

    0.003um

    RFID Read Success Rate

    >99.99%

    Position Sensor

    2 Pcs


    Supporting Products
    BACK
    OHBP Software
    Product Function
    The OHBP control system cleans and purges the ports of the entire bay, offering two modes: continuous purge and inductive purge. It can be equipped with RFID sensors and temperature/humidity sensors, recording the number of Foup placements and tracking temperature/humidity changes throughout the purge process. In case of abnormal RFID readings or substandard temperature/humidity, it provides real-time alarm functionality;

    The Web UI interface allows for manual adjustment of the proportional valve, real-time control of airflow, adjustment of temperature, humidity, flow, and pressure monitoring ranges, and manual control of the solenoid valve's switch.

    Feature Highlights:
    ▪ Multi-disk real-time monitoring, ensuring stability and reliability.
    ▪ With the MF FabScope system, it can quickly pinpoint the of any abnormal disk status.
    ▪ Recipe management is supported.
    Feature Highlights：

    Multi-disk real-time monitoring, ensuring stability and reliability

    With the MF FabScope system, it can quickly pinpoint the of any abnormal disk status

    Recipe management is supported